NanoFabrication Kingston (NFK), a collaboration between Queen’s University and CMC Microsystems, is a new open-access lab providing researchers with access to leading-edge equipment, methodologies, and expertise for designing and prototyping microsystems and nanotechnologies.
Website
Up-to-date information on lab capabilities, fees, procedures, etc. can be found on our website: http://www.nanofabkingston.ca
Location & Hours
Innovation Park
Access 24/7; staffed hours 8:30-4:30 M-F
Featured Instrumentation
Class 1000 cleanroom space with laminar flow hood
Electron beam lithography system/Scanning electron microscope (Raith Poineer)
Laser micromachining system (Oxford Lasers Alpha Series)
Maskless lithography system (IMP SF-100 Xpress)
Photolithography mask aligner (NxQ 4006)
Chemical printing system (SonoPlot GIX Microplotter)
Physical vapour deposition – electron beam evaporator (Thermionics 3 kW Linear e-Gun)
Physical vapour deposition – sputter (Lesker PVD 75)
Reactive Ion Etching system (Trion Minilock III RIE)
Contact Information
