Department of Chemistry

DEPARTMENT OF

Chemistry

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NanoFabrication Kingston

NanoFabrication Kingston (NFK), a collaboration between Queen’s University and CMC Microsystems, is a new open-access lab providing researchers with access to leading-edge equipment, methodologies, and expertise for designing and prototyping microsystems and nanotechnologies.

Website

Up-to-date information on lab capabilities, fees, procedures, etc. can be found on our website: http://www.nanofabkingston.ca

Location & Hours

Innovation Park

Access 24/7; staffed hours 8:30-4:30 M-F

Featured Instrumentation

Class 1000 cleanroom space with laminar flow hood

Electron beam lithography system/Scanning electron microscope (Raith Poineer)

Laser micromachining system (Oxford Lasers Alpha Series)

Maskless lithography system (IMP SF-100 Xpress)

Photolithography mask aligner (NxQ 4006)

Chemical printing system (SonoPlot GIX Microplotter)

Physical vapour deposition – electron beam evaporator (Thermionics 3 kW Linear e-Gun)

Physical vapour deposition – sputter (Lesker PVD 75)

Reactive Ion Etching system (Trion Minilock III RIE)

Contact Information

Photo: Graham Gibson

Dr. Graham Gibson

Email: gibson@cmc.ca

Ph: (613) 530-4786